Ion beam gun

Details Ion beam gun Ion beam gun

1982-08-27

1985-06-04

Chatmon, Saxfield

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250423R, 31511131, 3133601, 3133631, H01J 724, H05B 3126

Patent

active

045217190

ABSTRACT:
The invention relates to an ion beam gun having a pair of electrodes for applying a high-frequency high voltage to ionize an ionization gas, the ions produced being extracted by an extraction electrode arranged behind the pair of electrodes in the direction of the ion beam (FIG. 1).

REFERENCES:
patent: 3015745 (1962-01-01), Klein
patent: 3476968 (1969-11-01), Omura
patent: 3956666 (1976-05-01), Reader et al.
patent: 4220545 (1980-09-01), Franzen et al.
patent: 4339691 (1982-07-01), Morimiya et al.
patent: 4367429 (1983-01-01), Wang et al.

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