Ion beam generating apparatus, film-forming apparatus, and metho

Details Ion beam generating apparatus, film-forming apparatus, and metho Ion beam generating apparatus, film-forming apparatus, and metho

1992-03-27

1992-12-01

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511121, 31511131, 31511141, 31323131, 250423R, 20429838, 20429841, H01J 2708, H01J 2718, H05H 124

Patent

active

051681978

ABSTRACT:
An ion beam generating apparatus including a vacuum chamber for retaining a vacuum therein, a microwave being introduced therein through at least one portion thereof, at least one vacuum arc plasma generating source having a cathode, an anode, and arc generating device and disposed inside the vacuum chamber, and ion extracting device for extracting ions from the plasma.

REFERENCES:
patent: 4612477 (1986-09-01), Dothan
patent: 4785220 (1988-11-01), Brown et al.
patent: 4883968 (1989-11-01), Hipple et al.
patent: 4924102 (1990-05-01), Toya et al.
patent: 5022977 (1991-06-01), Matsuoka et al.

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