Ion beam accelerator system

Electric lamp and discharge devices – With temperature modifier – For lead-in-seal or stem protection

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3133601, 3133611, 3133631, 31511131, 31511181, H05H 502

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active

044477732

ABSTRACT:
A system is described that combines geometrical and electrostatic focusing to provide high ion extraction efficiency and good focusing of an accelerated ion beam. The apparatus includes a pair of curved extraction grids (16, 18) with multiple pairs of aligned holes positioned to direct a group of beamlets (20) along converging paths. The extraction grids are closely spaced and maintained at a moderate potential to efficiently extract beamlets of ions and allow them to combine into a single beam (14). An accelerator electrode device (22) downstream from the extraction grids, is at a much lower potential than the grids to accelerate the combined beam.

REFERENCES:
patent: 3852633 (1974-12-01), Hunter
patent: 3999097 (1976-12-01), Ko et al.
patent: 4028579 (1977-06-01), King
"Experimental Study of Ion Beamlet Steering . . . ," by Y. Okumura et al., Review of Scientific Instruments, vol. 51, No. 4, Apr. 1980, pp. 471-473.

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