Ion accelerator and a method for increasing its efficiency

Details Ion accelerator and a method for increasing its efficiency Ion accelerator and a method for increasing its efficiency

1979-07-16

1982-04-13

La Roche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250427, 313230, 3133631, 376109, H01J 2702

Patent

active

043250050

ABSTRACT:
The ion accelerator comprises an arrangement consisting of getter pumps and gas storages. This makes for a possibility of gas pressure and gas phase composition control in the device after its being unsoldered from the vacuum installation. The device is equipped with an evaporator and an additional gas storage which permit renovating the target surface as required. Proposed herein is a method ensuring higher efficiency of the device operation.

REFERENCES:
patent: 3448315 (1969-06-01), Hirsch et al.
patent: 4135094 (1979-01-01), Hull
patent: 4157471 (1979-06-01), Mlekodaj

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