Iodine sterilization of deionized water in semiconductor process

Details Iodine sterilization of deionized water in semiconductor process Iodine sterilization of deionized water in semiconductor process

1988-03-28

1990-06-19

Pal, Asok

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

C03C 2300

Patent

active

049350641

ABSTRACT:
Trace quantities of elemental iodine are added to deionized water used in the manufacture of semiconductor materials and devices in order to sterilize the water and the delivery system of microscopic life forms, and to leave the iodine in the flow all the way through processing except for those process steps where iodine may be detrimental to the process step.

REFERENCES:
The Kirk-Othmer Encyclopedia of Chemical Technology, 3rd edition, vol. 13, pp. 649-677, John-Wiley, 1981.

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