Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2005-11-22
2005-11-22
Ahmed, Samir (Department: 2623)
Image analysis
Applications
Manufacturing or product inspection
C702S035000, C356S237400
Reexamination Certificate
active
06968079
ABSTRACT:
The present invention relates to an inspection device and inspection method of a specimen, particularly to the inspection device and inspection method of defects of semiconductor wafers, and the object is to cope with the increase of inspection images and provide an inspection device and inspection method which is capable of classification by sub class, meeting the user needs, in addition to the automatic classification by an inspection device.To achieve the afore-mentioned object, the present invention provides an inspection device, comprising a storage means for storing the images obtained and a display means equipped with the first display area for displaying multiple images stored in the storage means and the second display area for displaying the images which are classified according to the characteristics of the displayed images (called the classified images), wherein the display means displays the class of the specimen, displays the sub class which is set manually for each class, and also displays the images selected by the sub class as a mass of the classified images for each sub class.
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Semiconductor World, 1996, 8 Issue, pp. 88 to 91 and 99 to 105.
Hirai Takehiro
Kitahashi Katsuhiro
Komuro Hitoshi
Machida Kazuhisa
Yoshikawa Akira
Ahmed Samir
Hitachi , Ltd.
Mattingly ,Stanger ,Malur & Brundidge, P.C.
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