Inverted thin film resistor and method of manufacture

Details Inverted thin film resistor and method of manufacture Inverted thin film resistor and method of manufacture

1999-10-29

2000-09-19

Dang, Trung

Semiconductor device manufacturing: process

Making passive device

Resistor

438381, 438384, 438385, 148DIG136, H01L 2120

Patent

active

061211052

ABSTRACT:
An integrated circuit inverted thin film resistor structure and method of manufacture having interconnect defining resistor contacts and leads resident within and coplanar with a supporting layer, resistive material uniformly overlaying the supporting layer and contacts, the resistive material diffused into the resistor/interconnect contact region.

REFERENCES:
patent: 5316978 (1994-05-01), Boyd et al.
patent: 5877059 (1999-03-01), Harward
patent: 5940712 (1999-08-01), Prall et al.

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