Inverted thin film resistor

Details Inverted thin film resistor Inverted thin film resistor

1997-10-29

2000-03-07

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257537, 338307, 338314, H01L 2900

Patent

active

060344113

ABSTRACT:
An integrated circuit inverted thin film resistor structure and method of manufacture having interconnect defining resistor contacts and leads resident within and coplanar with a supporting layer, resistive material uniformly overlaying the supporting layer and contacts, the resistive material diffused into the resistor/interconnect contact region.

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