Inverted magnetron ion source

Details Inverted magnetron ion source Inverted magnetron ion source

1982-07-12

1985-09-17

Dixon, Harold

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250427, 250423R, 31511191, H01J 724

Patent

active

045423210

ABSTRACT:
The present invention provides, in a preferred embodiment, a cylindrical stainless steel cathode with end pieces thereon to form a cathode chamber within. In addition, in a preferred embodiment, there is a stainless steel rod which passes axially through the cathode chamber and which is electrically insulated therefrom at the end pieces. The stainless steel cathode has first and second apertures formed therein with the first to be connected to a source of ionizable gas and the second to act as the opening through which there passes a stream of ions to an ion beam target. A magnetic flux source is coupled to the cathode chamber to pass magnetic flux therethrough and a voltage source is connected between the anode and the cathode to provide an electrostatic field therebetween whereby when ionizable gas is fed into the cathode chamber, it is ionized and a stream of ions emanates from the second aperture. In a preferred embodiment there is further provided an electrostatic ion focusing means to focus the ion stream emanating from the second aperture.

REFERENCES:
patent: 2131897 (1938-10-01), Malter
patent: 3156842 (1964-11-01), McClure
patent: 3292844 (1966-12-01), McKenzie
patent: 4139772 (1979-02-01), Williams

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