Coating processes – Electrical product produced – Condenser or capacitor
Patent
1984-10-29
1986-05-20
Smith, John D.
Coating processes
Electrical product produced
Condenser or capacitor
118 50, 118 52, 118 54, 118 56, 427240, 430935, B05D 512
Patent
active
045900949
ABSTRACT:
The invention described avoids all the problems of the above described prior art techniques and is characterized by holding the workpiece in an inverted position, contacting the inverted face of the workpiece with a precisely metered amount of a flowable material and rotating the workpiece in its inverted position after it has contacted the polymer to coat the workpiece with a thin, uniform layer of the flowable material. The present invention is also directed to an apparatus for coating a substrate comprising, a spindle holding the workpiece in an inverted manner so that the face of the workpiece to be coated faces downwardly towards a liquid deposit of the coating material which is supported on a nozzle beneath the spindle, which spindle may be moved to permit the inverted slice to contact the liquid deposit and means for spinning the spindle in the inverted position to spread the coating material uniformly across the face of the spinning workpiece.
REFERENCES:
patent: 3359132 (1967-12-01), Wittman
patent: 3695911 (1972-10-01), Polin
patent: 4267208 (1981-05-01), Ireland
patent: 4378953 (1983-04-01), Winn
patent: 4451507 (1984-05-01), Beltz et al.
patent: 4476162 (1984-10-01), Ireland
IBM Technical Disclosure Bulletin, vol. 17, #11, Apr. 1975, pp. 3211-3212, "Use of Venturi to Accomplish Resist Splatter Dispersal".
Thickness Variance of Spun-On Photoresist, Revisted", Proceeding of the Kodak Microelectronics Seminar 1978, by J. W. Daughton et al.
Bell Janyce A.
International Business Machines - Corporation
Smith John D.
Thornton Francis J.
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