Inverted alignment station and method for calibrating needles of

Details Inverted alignment station and method for calibrating needles of Inverted alignment station and method for calibrating needles of

1997-07-02

1999-12-14

Le, Vu

Television

Special applications

Manufacturing

348 94, 348 95, 348126, 348190, 382144, 382151, 324758, H04N 1700

Patent

active

060024267

ABSTRACT:
A probe needle alignment device supports a probe card assembly with probe needles extending upward. A microscope includes a first eyepiece aligned with the probe needles in its field of view. A first video camera is positioned in optical alignment with the first eyepiece to view probe needles through the first eyepiece. An overdriver includes a transparent planar plate movably disposed between the microscope and the probe needles to displace contact tips of the probe needles through an overdrive distance. A mask plate has a plurality of spots located at positions corresponding precisely to positions of contact pads of an integrated circuit to be probe tested. A second video camera includes the spots within its field of view. Video signals produced by the first and second video cameras are combined to simultaneously represent images of the probe needles and the spots on the probe plate are converted to video images and overlapping images of the probe needles and the spots are simultaneously displayed in a virtual reality headset to aid in alignment of contact tips of probe needles with corresponding spots of the mask plate.

REFERENCES:
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patent: 5422579 (1995-06-01), Yamaguchi
patent: 5508527 (1996-04-01), Kuroda et al.
patent: 5530374 (1996-06-01), Yamaguchi
patent: 5657075 (1997-08-01), Roessner
patent: 5657394 (1997-08-01), Schwartz etal.
patent: 5831443 (1998-11-01), Quarre et al.
patent: 5881165 (1999-03-01), Tanaka

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