Inversely processed resistance heater

Details Inversely processed resistance heater Inversely processed resistance heater

1985-01-04

1986-10-14

Goldberg, Howard N.

Metal working

Method of mechanical manufacture

Electrical device making

29846, 427444, 427445, H05B 300

Patent

active

046164081

ABSTRACT:
A unique inverse processed film resistance heater structure is disclosed. A conventional passivation wear layer is deposited directly on a first substrate, followed by the deposition and patterning of resistive and conductive layers, and covered by an isolation layer and a thick support layer. The thick support layer is then bonded to a second substrate and the first substrate is removed so that a uniform, flat passivation layer is exposed. The result is a film resistor which has a reduced failure rate as compared to the prior art because it is covered by a passivation wear layer with fewer pin-holes and reduced stress.

REFERENCES:
patent: 3324014 (1967-06-01), Modjeska
patent: 4169032 (1979-09-01), Haase
patent: 4194108 (1980-03-01), Nakajima et al.
patent: 4241103 (1980-12-01), Ohkubo et al.
patent: 4306925 (1981-12-01), Lebow et al.

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