Inversely processed resistance heater

Details Inversely processed resistance heater Inversely processed resistance heater

1986-08-21

1988-03-29

Scott, J. R.

Electric heating

Heating devices

With heating unit structure

219216, 338309, H05B 100

Patent

active

047345632

ABSTRACT:
A unique inverse processed film resistance heater structure including a conventional passivation wear layer which is deposited directly on a first substrate. This deposition step is then followed by the deposition and patterning of resistance and conductive layers, and these layers are covered by an isolation layer and a thick support layer. The thick support layer is then bonded to a second substrate and the first substrate is removed so that a uniform, flat passivation layer is exposed. The result is a film resistor which has a reduced failure rate as compared to the prior art because it is covered by a planar passivation wear layer with fewer pin-holes and reduced stress.

REFERENCES:
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patent: 4169032 (1979-09-01), Haase et al.
patent: 4194108 (1980-03-01), Nakajima et al.
patent: 4232213 (1980-11-01), Taguchi et al.
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patent: 4259564 (1981-03-01), Ohkubo et al.
patent: 4296309 (1981-10-01), Shinmi et al.
patent: 4298786 (1981-11-01), Marciniec
patent: 4306925 (1981-12-01), Lebow et al.
patent: 4343986 (1982-08-01), Mitani et al.
patent: 4438321 (1984-03-01), Morew

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