Interposer element for photomasks in projection printer

Photocopying – Projection printing and copying cameras – Focus or magnification control

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

G03B 2752

Patent

active

045292990

ABSTRACT:
A spacer (52) of an interposer element (51) is placed between support surfaces (27) of a mounting chuck (12) in a projection printer (14) and a photomask (48) which is not protected by a coverplate. The interposer element (51) further features a transparent plate (53) which becomes interposed in the optical path (46) of the projection printer (14) in a position spaced from the photomask (48). The plate (53) shifts the objective focal plane (44) with respect to which the support surfaces (27) are adjusted outward away from an image plane by a distance equal to the shift of the objective focal plane due to the coverplate of a coverplate-protected photomask. Consequently, the spacer (52) features a preferred thickness of a coverplate of such coverplate-protected photomask to position patterns (21) of object features on the unprotected photomask (48) in the plane to which the focal plane is shifted by the interposed plate (53).

REFERENCES:
patent: 2754208 (1956-07-01), Conrad
patent: 3379831 (1963-04-01), Loebach
patent: 3498713 (1970-03-01), Schlegel et al.
patent: 3659937 (1972-05-01), Yamanoi
patent: 3951701 (1976-04-01), Csillag
patent: 4063812 (1977-12-01), Abraham et al.
patent: 4084895 (1978-04-01), Ogawa et al.
patent: 4361643 (1982-11-01), Banks et al.
patent: 4390273 (1983-06-01), Loebach

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Interposer element for photomasks in projection printer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interposer element for photomasks in projection printer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interposer element for photomasks in projection printer will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1733426

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.