Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2009-07-16
2009-12-22
Rachuba, Maurina (Department: 3727)
Abrading
Abrading process
Glass or stone abrading
C451S527000, C451S536000
Reexamination Certificate
active
07635291
ABSTRACT:
Chemical mechanical polishing pads are provided, wherein the chemical mechanical polishing pads have a polishing layer comprising an interpenetrating network including a continuous non-fugitive phase and a substantially co-continuous fugitive phase. Also provided are methods of making the chemical mechanical polishing pads and for using them to polish substrates.
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Deibert Thomas S.
Rachuba Maurina
Rohm and Haas Electronic Materials CMP Holdings Inc.
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