Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2006-03-21
2006-03-21
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C248S628000, C073S514320
Reexamination Certificate
active
07013730
ABSTRACT:
An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively stationary frame by a plurality of serpentine suspension members having internal caging. The device provides easily implemented fabrication modification for trading-off between input range and pick-off sensitivity by altering etching periods of the serpentine suspension members. The input range and pick-off sensitivity can be traded-off by enlarging or reducing the quantity of elongated flexure fingers forming the serpentine suspension member. Different ones of the elongated flexure fingers are optionally formed with different thicknesses, whereby the serpentine suspension member exhibits a spring rate that progressively increases as it is compressed by in-plane motion of the proof mass relative to the relatively stationary frame.
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Chapman John E.
Charles J. Rupnick Attorney at Law
Honeywell International , Inc.
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