Internally heated pyrolysis zone

Details Internally heated pyrolysis zone Internally heated pyrolysis zone

1997-03-14

2000-04-18

Bueker, Richard

Coating processes

Coating by vapor, gas, or smoke

Organic coating applied by vapor, gas, or smoke

118719, 118724, 118726, C23C 1600

Patent

active

060512768

ABSTRACT:
A method and apparatus for more efficiently depositing a gas onto a surface. In one embodiment, a deposition apparatus is provided. The deposition apparatus comprises a deposition chamber, a tube and a heating element. The tube is in fluid communication with the deposition chamber, and the heating element is constructed and arranged so that the heating element preferentially heats the centerline of the tube relative to the inner surface of the tube. In another embodiment, a method of depositing a product gas onto a surface is provided. The method comprises placing a first gas into a tube; heating first and second portions of the first gas to first and second temperatures, respectively, to form the product gas, the first portion of the first gas being adjacent the centerline of the tube, the second portion of the first gas being adjacent the inner surface of the tube, the first temperature being greater than the second temperature; and depositing the product gas onto the surface.

REFERENCES:
patent: 3211128 (1965-10-01), Potter et al.
patent: 3246627 (1966-04-01), Loeb et al.
patent: 3301707 (1967-01-01), Loeb et al.
patent: 3472795 (1969-10-01), Tittmann et al.
patent: 3554512 (1971-01-01), Elliott
patent: 3570449 (1971-03-01), Blecherman
patent: 3573968 (1971-04-01), Loeb
patent: 3600216 (1971-08-01), Stewart
patent: 3667424 (1972-06-01), Cornelius et al.
patent: 3670693 (1972-06-01), Rorick et al.
patent: 3747558 (1973-07-01), Harel
patent: 3749601 (1973-07-01), Tittle
patent: 4110392 (1978-08-01), Yamazaki
patent: 4184188 (1980-01-01), Briglia
patent: 4261762 (1981-04-01), King
patent: 4323031 (1982-04-01), Kaplan
patent: 4362125 (1982-12-01), Schadler
patent: 4401052 (1983-08-01), Baron et al.
patent: 4468283 (1984-08-01), Ahmed
patent: 4495889 (1985-01-01), Riley
patent: 4508055 (1985-04-01), Elton et al.
patent: 4518623 (1985-05-01), Riley
patent: 4577465 (1986-03-01), Olsen et al.
patent: 4596208 (1986-06-01), Wolfson et al.
patent: 4613306 (1986-09-01), Bauer et al.
patent: 4619844 (1986-10-01), Pierce et al.
patent: 4683143 (1987-07-01), Riley
patent: 4734533 (1988-03-01), Ungarelli et al.
patent: 4761269 (1988-08-01), Conger et al.
patent: 4783561 (1988-11-01), Pregaglia et al.
patent: 4795838 (1989-01-01), Bornengo et al.
patent: 4816608 (1989-03-01), Bornengo et al.
patent: 4846998 (1989-07-01), Pohl et al.
patent: 4853488 (1989-08-01), Ungarelli et al.
patent: 4877433 (1989-10-01), Oshitari
patent: 4883020 (1989-11-01), Kasai et al.
patent: 4886923 (1989-12-01), Ungerelli et al.
patent: 4902572 (1990-02-01), Horne et al.
patent: 4903754 (1990-02-01), Hirscher et al.
patent: 4945856 (1990-08-01), Stewart
patent: 4957781 (1990-09-01), Kanegae et al.
patent: 5002011 (1991-03-01), Ohmine et al.
patent: 5007372 (1991-04-01), Hattori et al.
patent: 5015503 (1991-05-01), Varrin, Jr. et al.
patent: 5078091 (1992-01-01), Stewart
patent: 5078851 (1992-01-01), Nishihata et al.
patent: 5079045 (1992-01-01), Luhmann et al.
patent: 5088444 (1992-02-01), Ohmine et al.
patent: 5091207 (1992-02-01), Tanaka
patent: 5112642 (1992-05-01), Wajid
patent: 5121707 (1992-06-01), Kanoo
patent: 5123375 (1992-06-01), Hansen
patent: 5129360 (1992-07-01), Ahern et al.
patent: 5151133 (1992-09-01), Ohmine et al.
patent: 5167717 (1992-12-01), Boitnott
patent: 5186120 (1993-02-01), Ohnishi et al.
patent: 5217755 (1993-06-01), Thebault et al.
patent: 5221403 (1993-06-01), Nozawa et al.
patent: 5228501 (1993-07-01), Tepman et al.
patent: 5248370 (1993-09-01), Tsui et al.
patent: 5248380 (1993-09-01), Tanaka
patent: 5250092 (1993-10-01), Nakano
patent: 5250323 (1993-10-01), Miyazaki
patent: 5254171 (1993-10-01), Hayakawa et al.
patent: 5261963 (1993-11-01), Basta et al.
patent: 5262194 (1993-11-01), Bischer, Jr. et al.
patent: 5264039 (1993-11-01), Gobush et al.
patent: 5266118 (1993-11-01), Mitra
patent: 5268033 (1993-12-01), Stewart
patent: 5268202 (1993-12-01), You et al.
patent: 5270266 (1993-12-01), Hirano et al.
patent: 5292554 (1994-03-01), Sinha et al.
patent: 5302767 (1994-04-01), Galley et al.
patent: 5324540 (1994-06-01), Terada
patent: 5344492 (1994-09-01), Sato et al.
patent: 5350453 (1994-09-01), Schlosser
patent: 5401316 (1995-03-01), Shiraishi et al.
patent: 5439525 (1995-08-01), Peichl et al.
patent: 5447799 (1995-09-01), Loh et al.
patent: 5458687 (1995-10-01), Shichida et al.
patent: 5470802 (1995-11-01), Gnade et al.
patent: 5534068 (1996-07-01), Beach et al.
patent: 5536317 (1996-07-01), Crain et al.
patent: 5536321 (1996-07-01), Olson et al.
patent: 5536322 (1996-07-01), Wary et al.
patent: 5556473 (1996-09-01), Olson et al.
L. You, et al., Chemical Perspectives of Microelectronic Materials III Symposium (1992).
J. Apl. Pol. Sci., 13, 2325 Chow, et al.
Chow, S.W., "Poly (.alpha.,.alpha.,.alpha.,.alpha.',.alpha.'-tetrafluoro-p-xylylene)", Journal of Applied Polymer Science, vol. 13, pp. 2325-2332, 1969.
You, L. et al., "Vapor Deposition fo Paraylene Films from Precursors", Chemical Perspectives of Microelectronics Materials III Symposium.
Mikami Takashi, "Quartz Crystal Oscillator Type Radical Beam Monitor", Patent Abstracts of Japan, Patent No. 07050258.
Journal of Vacuum Science and Technology A11(6)(1993).

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