Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1989-09-15
1990-09-18
Morgenstern, Norman
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
4272553, 427255, C23C 1600
Patent
active
049577808
ABSTRACT:
A chemical vapor deposition process in which an internal reactor is disposed within a chemical vapor deposition reactor including means for enclosing a reaction chamber and means for heating the reaction chamber. The position at which the internal reactor is disposed relative to the heating means is selected to provide control of the temperature within the internal reactor. At least two solid precursor materials are placed in the internal reactor and are contacted with at least one precursor gas, reactive with the solid precursor materials to produce at least two reactant gases. These gases are directed to the reaction chamber to react with one or more additional reactants.
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D'Angelo Charles
Rebenne Helen E.
Sarin Vinod K.
Childs Sadie
Craig Frances P.
GTE Laboratories Incorporated
Morgenstern Norman
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