Internal peripheral edge type blade holding device

Details Internal peripheral edge type blade holding device Internal peripheral edge type blade holding device

1988-06-27

1989-06-13

Schmidt, Frederick R.

Stone working

Sawing

Rotary

125 13R, B28D 104

Patent

active

048382388

ABSTRACT:
An internal peripheral edge type blade holding device for use in an internal peripheral edge type slicing machine used when a silicone ingot is sliced into thin pieces each having a thickness of the order of several hundred microns in a semiconductor manufacturing process. In the blade holding device, a head assembly for stretching and holding an internal peripheral edge blade is supported to a rotary plate through 4 plate springs spaced at 90.degree. intervals. Accordingly, when stretching the internal peripheral edge blade, even if the tension assembly is deformed because of the anisotropic property of the blade, such deformation can be absorbed by the plate springs and thus is not transmitted to the rotary plate, so that the swaying of the edge of the internal peripheral edge blade can be prevented in cutting the ingot.

REFERENCES:
patent: 4637369 (1987-01-01), Petermann et al.
patent: 4716881 (1988-01-01), Steere

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