Internal member for plasma-treating vessel and method of...

Details Internal member for plasma-treating vessel and method of... Internal member for plasma-treating vessel and method of...

2005-04-26

2005-04-26

Jones, Deborah (Department: 1775)

Stock material or miscellaneous articles

Composite

Of metal

C428S610000, C428S613000, C428S623000, C428S633000, C428S701000, C427S453000, C427S454000, C427S455000, C427S456000

Reexamination Certificate

active

06884516

ABSTRACT:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3film formed on the undercoat as a middle layer and Y2O3sprayed coating formed on the middle layer as a top coat.

REFERENCES:
patent: 6120640 (2000-09-01), Shih et al.
patent: 6383964 (2002-05-01), Nakahara et al.
patent: 6738863 (2004-05-01), Butterworth et al.
patent: 6783863 (2004-08-01), Harada et al.
patent: 64-039728 (1989-02-01), None
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patent: 5-238859 (1993-09-01), None
patent: 6-057396 (1994-03-01), None
patent: 6-136505 (1994-05-01), None
patent: 6-142822 (1994-05-01), None
patent: 7-126827 (1995-05-01), None
patent: 7-176524 (1995-07-01), None
patent: 8-037180 (1996-02-01), None
patent: 8-339895 (1996-12-01), None
patent: 9-069554 (1997-03-01), None
patent: 9-272987 (1997-10-01), None
patent: 10-4083 (1998-01-01), None
patent: 10-45461 (1998-02-01), None
patent: 10-45467 (1998-02-01), None
patent: 10-251871 (1998-09-01), None
patent: 11-080925 (1999-03-01), None
patent: 11-207161 (2001-02-01), None
patent: 2001-31484 (2001-02-01), None
JIS Using Series, “Spraying Techniques Manual”, p. 95 (Oct. 30, 1998, Japanese Standard Association), with English Translation.*
English Language Abstract of JP 10-4083.
English Language Abstract of JP 10-45467.
English Language Abstract of JP 5-117064.
English Language Abstract of JP 10-45461.
English Language Abstract of JP 2001-31484.
English Language Abstract of JP Appln. No. 06-136505.
English Language Abstract of JP Appln. No. 08-037180.
English Language Abstract of JP Appln. No. 05-238859.
English Language Abstract of JP Appln. No. 09-272987.
English Language Abstract of JP Appln. No. 09-069554.
English Language Abstract of JP Appln. No. 06-057396.
English Language Abstract of JP Appln. No. 64-039728.
English Language Abstract of JP Appln. No. 8-339895.
English Language Abstract of Jp Appln. No, 07-176524.
English Language Abstract of JP Appln. No. 06-142822.
English Language Abstract of JP Appln. No. 11-080925.
English Language Abstract of JP Appln. No. 03-115535.
English Language Abstract of JP Appln. No. 07-126827.
English Language Abstract of JP 10-251871, published Sep. 22, 1998.

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