Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1994-08-10
1996-07-23
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
3613214, 3613211, 257304, 365149, H01G 4005, H01G 406
Patent
active
055396127
ABSTRACT:
A method for forming a storage capacitor (12) including the step of forming a storage node contact window (38) and forming a cavity (48) in the storage electrode (50) such that the capacitive area includes the sidewalls of the storage electrode and the cavity in the storage electrode. The capacitor is completed by forming a dielectric layer (54) over the storage electrode (50) and forming a conductive layer (56) over the dielectric layer (54) to act as a plate electrode capacitively-coupled to the storage electrode (50) through the dielectric layer (54). Other devices, systems and methods are also disclosed.
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Bassuk Lawrence J.
Donaldson Richard L.
Ledynh Bot L.
McCormack Brian C.
Texas Instruments Incorporated
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