Conveyors: power-driven – Conveyor system having auxiliary section for storing items...
Reexamination Certificate
2006-09-19
2006-09-19
Hess, Douglas A. (Department: 3651)
Conveyors: power-driven
Conveyor system having auxiliary section for storing items...
Reexamination Certificate
active
07108121
ABSTRACT:
An intermediate product transferring apparatus is provided for transferring an intermediate product W between a single-wafer carrying line for carrying the intermediate product W in a single-wafer manner and a manufacturing apparatus for manufacturing the intermediate product W includes a transferring robot for transferring the intermediate product W between the single-wafer carrying line and the manufacturing apparatus; and a buffer for temporarily storing the intermediate product W which is transferred from the single-wafer carrying line by the transferring robot or the intermediate product W which is processed by the manufacturing apparatus.
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Fujimura Hisashi
Kobayashi Yoshitake
Tanaka Shuji
Hess Douglas A.
Seiko Epson Corporation
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