Intermediate product manufacturing apparatus, and...

Metal working – Barrier layer or semiconductor device making

Reexamination Certificate

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Reexamination Certificate

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10814654

ABSTRACT:
A manufacturing apparatus is provided comprising: inter-process carrying means for carrying a container between the process modules in a container unit, the container being capable of storing a plurality of intermediate products therein; intra-process carrying means for removing the intermediate products from the container and carrying the intermediate products within each process module in a single product state; and a plurality of processing means for performing the plurality of processes, respectively, within each process module, wherein the plurality of processing means are arranged substantially in the carrying direction of the intermediate products in accordance with the order of processes to be performed on the intermediate products, without arranging a plurality of processing means for performing the same kinds of processes on the intermediate products in a group.

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patent: 6440178 (2002-08-01), Berner et al.
patent: 6503375 (2003-01-01), Maydan et al.
patent: 02-078243 (1990-03-01), None
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patent: 08-181184 (1996-07-01), None
patent: 11-145022 (1999-05-01), None
patent: 2001-338968 (2001-12-01), None
patent: 2002-237512 (2002-08-01), None
Communication from Chinese Patent Office regarding corresponding application.

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