Interlocking lid for wet bench

Details Interlocking lid for wet bench Interlocking lid for wet bench

2006-11-28

2006-11-28

Ngo, Lien M. (Department: 3754)

Receptacles

Closures

Pivotable,

C134S155000

Reexamination Certificate

active

07140512

ABSTRACT:
An interlocking lid which is suitable for a wet bench tank used in the processing of semiconductor wafer substrates. The interlocking lid includes a pair of lid panels typically provided with a clasp having elements for engaging and interlocking with each other when the lid panels are in a closed position. At least one of the lids may further include a beveled lid shoulder which facilitates runoff of liquids from and hinders pooling of liquids on the exterior surface of the lid.

REFERENCES:
patent: 5975345 (1999-11-01), Taylor
patent: 6196470 (2001-03-01), Neumann
patent: 6644526 (2003-11-01), Pegorier
patent: 6692352 (2004-02-01), Gerber et al.
patent: 6926137 (2005-08-01), Rudnick et al.

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