Electricity: motive power systems – Positional servo systems – Program- or pattern-controlled systems
Patent
1999-06-01
2000-12-26
Ip, Paul
Electricity: motive power systems
Positional servo systems
Program- or pattern-controlled systems
318563, 31856812, 364140, H01L 2168, H02H 708, G02F 1900
Patent
active
061665053
ABSTRACT:
An interlocking apparatus includes a plurality of determination units independent of each other, an operation stopping circuit, a switch, and a restoring circuit. The plurality of determination units determine that a semiconductor device manufacturing equipment has shifted to a predetermined state. The operation stopping circuit sets the manufacturing equipment to an operation stop state when at least one of the plurality of determination units determines that the manufacturing equipment has shifted to the predetermined state. The switch inputs a restoration instruction instructing that the manufacturing equipment set in the operation stop state is restored to an operation state. The restoring circuit is responsive to the restoration instruction to restore the manufacturing equipment to the operation state only when the manufacturing equipment is set in the operation stop state determined by all of the plurality of determination units determining that the manufacturing equipment has shifted to the predetermined state.
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Canon Kabushiki Kaisha
Ip Paul
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