Interlayer dielectric film

Details Interlayer dielectric film Interlayer dielectric film

2011-05-24

2011-05-24

Moore, Margaret G (Department: 1765)

Stock material or miscellaneous articles

Composite

Of silicon containing

Reexamination Certificate

active

07947375

ABSTRACT:
An interlayer dielectric film is made from an organic/inorganic hybrid film. The organic/inorganic hybrid film has a main chain in which a first site of siloxane and a second site of an organic molecule are alternately bonded to each other.

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Excerpt from Webster,s Dictionary, p. 1172, 1998.

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