Interlaced array of piano MEMs micromirrors

Details Interlaced array of piano MEMs micromirrors Interlaced array of piano MEMs micromirrors

2007-01-23

2007-01-23

Pak, Sung (Department: 2874)

Optical waveguides

With optical coupler

Switch

C359S223100, C359S225100

Reexamination Certificate

active

11075650

ABSTRACT:
A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.

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