Interlaced array of piano MEMs micromirrors

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C359S223100, C359S225100

Reexamination Certificate

active

11075650

ABSTRACT:
A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.

REFERENCES:
patent: 5315429 (1994-05-01), Abramov
patent: 6327855 (2001-12-01), Hill et al.
patent: 6454421 (2002-09-01), Yu et al.
patent: 6491404 (2002-12-01), Hill
patent: 6529652 (2003-03-01), Brenner
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6535319 (2003-03-01), Buzzetta et al.
patent: 6778728 (2004-08-01), Taylor et al.
patent: 6992810 (2006-01-01), Pan et al.
patent: 2002/0126455 (2002-09-01), Wood
patent: 2003/0052569 (2003-03-01), Dhuler et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Interlaced array of piano MEMs micromirrors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interlaced array of piano MEMs micromirrors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interlaced array of piano MEMs micromirrors will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3743962

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.