Intergrating sphere ellipsometer

Details Intergrating sphere ellipsometer Intergrating sphere ellipsometer

1998-05-20

1999-07-27

Kim, Robert H.

Optics: measuring and testing

By polarized light examination

356236, 356369, 250228, G01J 400, G01J 104, G01J 100

Patent

active

059299940

ABSTRACT:
An integrating sphere ellipsometer includes an incident light polarization control unit, a reflective light polarization analysis unit, an integrating sphere and a total integrated scattered light detector. The incident light polarization control unit and the reflective light polarization analysis unit jointly function as an ellipsometer to obtain information such as film thickness and material complex refractive indices. Concurrently, the identical incident light polarization control unit, the total integrated scattered light detector and the integrating sphere unite to function as an integrating sphere analyzer to measure material defects, surface roughness, surface particulates, micropollutants, etc.

REFERENCES:
patent: 4873430 (1989-10-01), Juliana et al.
patent: 5757671 (1998-05-01), Drevillon et al.

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