Intergrated circuit with coaxial isolation and method

Details Intergrated circuit with coaxial isolation and method Intergrated circuit with coaxial isolation and method

1995-06-05

1998-09-29

Everhart, Caridad

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

257774, 257750, H01L 2700

Patent

active

058148892

ABSTRACT:
A die 810 has an outer, annular via 814 filled with conductive material in order to electrically shield an inner via 816. A die 820 can be electrically shielded from another area 822 by use of a wall 823 having a trench with oxidized side walls and a conductive filling.

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