Interferometry systems involving a dynamic beam-steering...

Details Interferometry systems involving a dynamic beam-steering... Interferometry systems involving a dynamic beam-steering...

2006-11-21

2006-11-21

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S493000, C356S500000

Reexamination Certificate

active

07139080

ABSTRACT:
An apparatus including: a multi-axis interferometry system configured to receive an input beam and direct at least two beams derived from the input beam to contact different locations on a measurement object to monitor changes in an angular orientation of the measurement object; a beam steering assembly having a beam steering element positioned to direct the input beam into the interferometry system and a positioning system to selectively orient the beam steering element relative to the interferometry system; and a control circuit which during operation orients the beam steering element based on the changes in the angular orientation of the measurement object monitored by the interferometry system.

REFERENCES:
patent: 4662750 (1987-05-01), Barger
patent: 4711573 (1987-12-01), Wijntjes et al.
patent: 4714339 (1987-12-01), Lau et al.
patent: 4790651 (1988-12-01), Brown et al.
patent: 4802765 (1989-02-01), Young et al.
patent: 4859066 (1989-08-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 5064289 (1991-11-01), Bockman
patent: 5306584 (1994-04-01), Palmer
patent: 5408318 (1995-04-01), Slater
patent: 5491550 (1996-02-01), Dabbs
patent: 5757160 (1998-05-01), Kreuzer
patent: 5781277 (1998-07-01), Iwamoto
patent: 5801832 (1998-09-01), Van Den Brink
patent: 5951482 (1999-09-01), Winston et al.
patent: 6040096 (2000-03-01), Kakizaki et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6122059 (2000-09-01), Inoue et al.
patent: 6252667 (2001-06-01), Hill et al.
patent: 6271923 (2001-08-01), Hill
patent: 6313918 (2001-11-01), Hill et al.
patent: 6330105 (2001-12-01), Rozelle et al.
patent: 6359692 (2002-03-01), Groot
patent: 6541759 (2003-04-01), Hill
patent: 6631004 (2003-10-01), Hill et al.
patent: 6819434 (2004-11-01), Hill
patent: WO 00/17605 (2000-03-01), None
patent: WO 00/66969 (2000-11-01), None
Bennett, S.J., “A Double-passed Michelson Interferometer,”Optics Communications, 4:428-430, Feb./Mar. 1972.

Affiliated with

Also associated with

Rating

Interferometry systems involving a dynamic beam-steering... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometry systems involving a dynamic beam-steering..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometry systems involving a dynamic beam-steering... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3655373