Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-09
2007-10-09
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S511000
Reexamination Certificate
active
11112681
ABSTRACT:
In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.
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Hill Henry A.
Womack Gary
Connolly Patrick J.
Toatley , Jr. Gregory J.
Zygo Corporation
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