Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1983-07-20
1986-06-10
Willis, Davis L.
Optics: measuring and testing
By particle light scattering
With photocell detection
356359, G01B 902
Patent
active
045940037
ABSTRACT:
Apparatus is disclosed for the phase measurement of an interference pattern produced by an unequal path interferometer. The invention comprises in one embodiment the use of a diode laser light source whose wavelength is varied so that the phase difference between the two wavefronts producing the interference pattern is modulated by a known amount. The modulated interference pattern is photosensed with an imaging device, and the signals processed to provide a phase map representing the optical path difference between the reference and measurement wavefronts of the interferometer.
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Koren Matthew W.
Willis Davis L.
Zygo Corporation
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