Interferometric tilt sensor

Optics: measuring and testing – By particle light scattering – With photocell detection

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356363, G01B 902

Patent

active

047462175

ABSTRACT:
An apparatus and method for remotely sensing the angular displacement of a test surface 22. Two coherent collimated light beams 10,12 having different optical frequencies are directed toward optically reflective target areas 18,20. The beams are reflected and converge to form a fringe pattern in an interference zone 24. A sampling means 34 having at least one sampling aperture is positioned within the interference zone 24. The sampling aperture lies in a plane substantially perpendicular to a plane formed by the converging beams and it has a width smaller than the effective spatial period of the fringe field, .lambda..sub.es, where .lambda..sub.es =.lambda..sub.s /cos.phi., .lambda..sub.s being the spatial period of the finge field and .phi. being the angular deviation of the plane of the sampling aperture from a plane which is perpendicular to the fringe planes of the fringe field. A light detector 42 is positioned to receive the modulated optical radiation which is sampled from the interference zone. This modulated optical radiation is converted into a sample electronic signal. Any rotation of the test surface 22 about the X-axis which is normal to the converging light beams is sensed by comparing the phase of the sample electronic signal to the phase of a reference electronic signal having a frequency equal to the frequency difference between the two light beam 10,12.

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