Interferometric system with reduced vibration sensitivity...

Details Interferometric system with reduced vibration sensitivity... Interferometric system with reduced vibration sensitivity...

2011-08-23

2011-08-23

Lee, Hwa (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

08004687

ABSTRACT:
A source module (12) generates mutually orthogonally polarized beams of light as emanating from two spatially separated point sources (Sv, Sw) for use in a phase shifting interferometer.

REFERENCES:
patent: 3950103 (1976-04-01), Schmidt
patent: 3958884 (1976-05-01), Smith
patent: 4583855 (1986-04-01), Bareket
patent: 4732483 (1988-03-01), Biegen
patent: 4872755 (1989-10-01), Kuchel
patent: 5491552 (1996-02-01), Knuttel
patent: 5995223 (1999-11-01), Power
patent: 6128080 (2000-10-01), Janik et al.
patent: 6304330 (2001-10-01), Millerd et al.
patent: 6341015 (2002-01-01), Shirley
patent: 6552808 (2003-04-01), Millerd et al.
patent: 6690474 (2004-02-01), Shirley
patent: 2003/0095264 (2003-05-01), Ruchet
patent: 196 52 113 (1998-06-01), None
patent: WO 2004/051182 (2004-06-01), None
Hettwer, et al., “Three Channel Phase-Shifting Interferometer Using Polarization-Optics and a Diffraction Grating”, The International Society for Optical Engineering, Optical Engineering, vol. 39, pp. 960-966, Apr. 2000 (abstract only).
Nakadate et al., “Real-Time Fringe Patter Processing and its Applications”, Proc. of SPIE, vol. 2544, pp. 74-86, Jun. 1995 (abstract only).
Sivakumar, et al., “Large Surface Profile Measurement with Instantaneous Phase-Shifting Interferometry”, Optical Engineering, Feb. 2003, vol. 42, Issue 2, pp. 367-372 (abstract only).
Koliopoulos, Chris L., “Simultaneous Phase-Shift Interferometer”, Proceedings of SPIE, vol. 1531, Advanced Optical Manufacturing and Testing II, 1992, pp. 119-127.

Affiliated with

Also associated with

Rating

Interferometric system with reduced vibration sensitivity... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometric system with reduced vibration sensitivity..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometric system with reduced vibration sensitivity... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2774299