Interferometric system having a reference surface including...

Details Interferometric system having a reference surface including... Interferometric system having a reference surface including...

2005-07-18

2011-10-11

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

08035821

ABSTRACT:
An interferometric system having an illumination arm, including a light source and an illuminating optical system, for forming an illuminating beam; an object arm, including a reference element for measuring an object having an object surface to be measured, for forming an image-rays path, the object to be measured having an object surface inaccessible to direct illumination; a reference arm including a reference element; a detector arm including a detector; and a beam splitter, the reference element having one or more mirrored zones. Consequently, component parts which have undercut surfaces in the illumination direction can be measured in a single measuring operation.

REFERENCES:
patent: 3788746 (1974-01-01), Baldwin et al.
patent: 6268921 (2001-07-01), Seitz et al.
patent: 6721094 (2004-04-01), Sinclair et al.
patent: 7483149 (2009-01-01), Strahle
patent: 41 08 944 (1992-09-01), None
patent: 197 21 843 (1999-02-01), None
patent: 197 38 900 (1999-03-01), None
patent: 198 08 273 (1999-09-01), None
patent: 673971 (1952-06-01), None
patent: 49-70649 (1974-07-01), None
patent: 63 259404 (1988-10-01), None
Patents Abstracts of Japan, vol. 013, No. 073, Feb. 20, 1989.

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