Interferometric surface profiler for spherical surfaces

Details Interferometric surface profiler for spherical surfaces Interferometric surface profiler for spherical surfaces

1988-10-28

1990-08-14

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

049482530

ABSTRACT:
An interferometric profiler for measuring the topography of a spherical test surface (48), comprises a linearly polarized light source (10), a rotating diffuser disc (18, 20); an optical system (26, 30, 31) for collecting and directing light from the extended light source; a first quarter-wave phase retardation plate (38); a lens (34) for focusing the resultant circularly polarized light beam onto a spherical test surface (48and a spherical reference surface (45), the surface (45) having a reflective coating (46) and an anti-reflection coating; a piezoelectric transducer (80) for varying the relative distance between the spherical test surface (48) and the spherical reference surface (45); means for recombining the test and reference wavefronts (53T,53R) to produce an interference pattern (74); a lens (65) for imaging the spherical test surface (48) and the spherical reference surface (45) onto the photosensitive elements (58) of an imaging device (56); means for optically isolating the imaged spherical test surface (48) and the spherical reference surface (45) and the interference pattern (74); means (38) for converting the test wavefront (53T) and reference wavefront (53R) into a third linearly polarized light beam which has its polarization vector rotated 90 degrees relative to the first linearly polarized light beam; the polarizing beamsplitter (30, 31) directing the third linearly polarized light beam to the imaging device (56); the imaging device (56) sensing the interference pattern (74), a CCTV monitor (72) for viewing the imaged spherical test surface (48) and the spherical reference surface (45) and the interference pattern (74); and means (76) for processing the output of the imaging device (56) to profile the topography of the test surface (48).

REFERENCES:
patent: 4696572 (1987-09-01), Ouo
patent: 4820049 (1989-04-01), Biegen

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