Interferometric surface profiler

Details Interferometric surface profiler Interferometric surface profiler

1987-03-19

1988-03-22

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

047324830

ABSTRACT:
An interferometric profiler capable of accurately measuring the topography of a surface under test (48) employs a laser source (10), with the surface under test (48) ultimately being imaged onto the photosensitive elements (58) of a solid state array camera (56) by an objective lens (34). In accomplishing this, the input beam (12) is transformed by a lens (14) into a spherically converging wavefront (16) which is focused onto a rotating diffuser disk (18) to significantly reduce the spatial coherence of the resultant spherically diverging wavefront (22) which is transformed by a lens (26) into a spherically converging wavefront (28) which is totally reflected by a polarizing beamsplitter (30) to produce a diverging wavefront (32). This wavefront (32) is transformed into a collimated wavefront (36) by the lens (34) and enters a quarter-wave phase retardation plate (38) which has an antireflection coating on this surface (40) with the other surface (42) being a flat reference surface. Objective lens (34) transforms the resulting wavefronts (52R) and (52M) into spherical wavefronts (53R) and (52M) which are transmitted as wavefronts (54R) and (54M) by beamsplitter (30) and fall onto the elements (58) of the imaging device (56).

REFERENCES:
patent: 4072423 (1978-02-01), Kimura et al.
patent: 4201473 (1980-05-01), Domenicali et al.
patent: 4594003 (1986-06-01), Sommargren
patent: 4632556 (1986-12-01), Akatsu
patent: 4639139 (1987-01-01), Wyant et al.

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