Interferometric surface distortion detector

Details Interferometric surface distortion detector Interferometric surface distortion detector

1989-04-20

1991-03-19

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

250237G, G01B 1124, H01J 314

Patent

active

050005740

ABSTRACT:
Portable shadow moire apparatus is disclosed for indiscriminately manipulng the grid and light source thereof over a specimen surface, with the grid oriented substantially in parallel therewith and in close proximity thereto. Self aligning support is provided on such apparatus, along with height adjustability for that support. Utilization of very high density grids is made possible by such apparatus to enhance the detection sensitivity thereof. Light source direction variability is also provided to control the magnitude of detectable distortion.

REFERENCES:
patent: 3619064 (1971-11-01), Brooks
patent: 3762818 (1973-10-01), Johnson et al.
patent: 3796498 (1974-03-01), Post
patent: 4030830 (1977-06-01), Holly
patent: 4051483 (1977-09-01), Suzuki
patent: 4079252 (1978-03-01), Brake
patent: 4527056 (1985-07-01), Burkhardt et al.
patent: 4659220 (1987-04-01), Bronte et al.

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