Interferometric profilometer sensor

Details Interferometric profilometer sensor Interferometric profilometer sensor

1990-12-24

1992-11-24

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, G01B 902

Patent

active

051667517

ABSTRACT:
The invention relates to an interferometer sensor for measuring distance changes of a small surface. The sensor defines a Mirau-like interferometer arrangement having a measurement surface and a reference surface. For making precise measurements of a small distance change, a retarder is arranged between these surfaces and effects a difference of the path differences between a measurement beam and a reference beam of approximately .lambda./4 for two polarization directions. The powers of the radiation components with these polarization directions are measured by a detecting device. The detecting device includes a polarization-dependent beam splitter and two detectors.

REFERENCES:
patent: 2612074 (1952-09-01), Mirau
patent: 4576479 (1986-03-01), Downs
patent: 4639139 (1987-01-01), Wyant et al.
patent: 4869593 (1989-09-01), Biegen
"Scanning Force Microscopy Using a Simple Low-Noise Interferometer", den Boef, Applied Physics Letters, Jul. 1989.
"Force Microscope Using a Fiber-Optic Displacement Sensor", by D. Rugar et al., Rev. Sci. Instrum 59(11), Nov. 1988, pp. 2337 to 2340.
"Differential Phase Quadrature Surface Profiling Interferometer", by B. Omar et al., Applied Optics, vol. 29, No. 31, Nov. 1990.
"Laser Measurement System for Precise and Fast Positioning", by S. Mori et al., Optical Engineering, vol. 27, No. 9, Sep. 1988.
Paper by R. Erlandsson et al., entitled "Atomic Force Microscopy Using Optical Interferometry", published in the J. Vac. Sci. Technol. A6 (2), Mar./Apr. 1988, pp. 266 to 270.

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