Interferometric pressure sensor capable of high temperature oper

Details Interferometric pressure sensor capable of high temperature oper Interferometric pressure sensor capable of high temperature oper

1989-05-09

1992-02-11

Willis, David L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

25022727, G01B 902

Patent

active

050871242

ABSTRACT:
An interferometric-based pressure transducer is fabricated from two layers of silicon having different crystal orientations which have been processed using selective anisotropic etching to produce in one silicon layer a mirror surface and a groove that is aligned with the mirror, and a pressure-responsive membrane in the other layer. The layers are joined with the membrane opposite the mirror, and an optical fiber is secured in the groove so that light from the optical fiber is conveyed by the mirror surface between the membrane and the optical fiber. Conventional interferometric apparatus compares transmitted and received light in order to sense deformation of the membrane and thereby sense pressure.

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