Interferometric phase measurement

Details Interferometric phase measurement Interferometric phase measurement

1993-03-12

1995-02-21

Hille, Rolf

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356359, G01B 902

Patent

active

053921160

ABSTRACT:
A phase measuring method and apparatus are described for determining the phase difference between two polarized light beams which, in contrast to prior phase measuring techniques, permits simultaneous signal evaluation. The orthogonally polarized light beams with the phase difference are initially split by a beam splitter into several partial beam pairs which, by means of a lens are focused as parallel beams into a phase shifter, a polarizer, and an array of light sensors. Phase differences of the light beams create intensity differences between the beams received by the different light sensors. High measuring speed and accuracy are thus provided. When combined with means for directing two spaced orthogonally polarized beams on a surface, the method and apparatus can be used to determine height differences along the surface.

REFERENCES:
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4358201 (1982-11-01), Makosch
patent: 4707137 (1987-11-01), Lee
patent: 4714348 (1987-12-01), Makosch
patent: 4844616 (1989-07-01), Kulkarni et al.
patent: 5235405 (1993-08-01), Sillitto et al.

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