Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1993-03-12
1995-02-21
Hille, Rolf
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356357, 356359, G01B 902
Patent
active
053921160
ABSTRACT:
A phase measuring method and apparatus are described for determining the phase difference between two polarized light beams which, in contrast to prior phase measuring techniques, permits simultaneous signal evaluation. The orthogonally polarized light beams with the phase difference are initially split by a beam splitter into several partial beam pairs which, by means of a lens are focused as parallel beams into a phase shifter, a polarizer, and an array of light sensors. Phase differences of the light beams create intensity differences between the beams received by the different light sensors. High measuring speed and accuracy are thus provided. When combined with means for directing two spaced orthogonally polarized beams on a surface, the method and apparatus can be used to determine height differences along the surface.
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patent: 5235405 (1993-08-01), Sillitto et al.
Hille Rolf
International Business Machines - Corporation
Leas James M.
Tran Minhloan
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