Interferometric optical tomography

Details Interferometric optical tomography Interferometric optical tomography

2008-04-01

2008-04-01

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S497000

Reexamination Certificate

active

07352474

ABSTRACT:
Embodiments of the present disclosure provide systems and methods for constructing a profile of sample object. Briefly described, in architecture, one embodiment of the system, among others, can be implemented as follows. An interferometer device is used to collect interference images of a sample object at a sequence of angles around the sample object. Accordingly, a controller device rotates the sample object to enable acquisition of the interference images; and a projection generator produces projections of the sample object from the interference images at the sequence of angles. Further, a tomographic device constructs the profile of the optical device from the projections of the interference images. The profile is capable of characterizing small index variations of less than 1×10−4. Other systems and methods are also included.

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