Interferometric optical systems having simultaneously...

Details Interferometric optical systems having simultaneously... Interferometric optical systems having simultaneously...

2006-03-14

2006-03-14

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07012700

ABSTRACT:
In certain aspects, the invention features scanning interferometry systems and methods that can scan an optical measurement surface over distances greater than a depth of focus of imaging optics in the interferometry system, while keeping an optical measurement surface in focus (i.e., maintaining an image of the optical measurement surface coincident with the detector). The optical measurement surface refers to a theoretical test surface in the path of test light in the interferometer that would reflect the test light to produce an optical path length difference (OPD) between it and reference light that is equal to a constant across a detector.

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