Interferometric optical display system with broadband...

Details Interferometric optical display system with broadband... Interferometric optical display system with broadband...

2009-12-09

2011-12-13

Spector, David N (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S298000

Reexamination Certificate

active

08077379

ABSTRACT:
Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.

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