Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-11-20
2007-11-20
Lee, Hwa (Andrew) (Department: 2886)
Optics: measuring and testing
By light interference
Having polarization
C356S498000
Reexamination Certificate
active
11170936
ABSTRACT:
In general, in one aspect, the invention features assemblies that include a first polarizing beam splitter positioned in the paths of a pair of initial beams, the polarizing beam splitter being configured to combine the pair of initial beams to form an input beam. The assemblies further include an interferometer positioned to receive the input beam and configured to produce an output beam that includes information about an optical path difference between the paths of two component beams derived from the input beam. A second polarizing beam splitter is positioned in the path of the output beam and configured to split the output beam into a pair of secondary output beams that each include information about the optical path difference between the component beam paths.
REFERENCES:
patent: 4606638 (1986-08-01), Sommargren
patent: 4684828 (1987-08-01), Sommargren
patent: 4685803 (1987-08-01), Sommargren
patent: 4688940 (1987-08-01), Sommargren et al.
patent: 4693605 (1987-09-01), Sommargren
patent: 4711573 (1987-12-01), Wijntjes et al.
patent: 4717250 (1988-01-01), Sommargren
patent: 4733967 (1988-03-01), Sommargren
patent: 4746216 (1988-05-01), Sommargren
patent: 4752133 (1988-06-01), Sommargren
patent: 4790651 (1988-12-01), Brown et al.
patent: 4802764 (1989-02-01), Young et al.
patent: 4802765 (1989-02-01), Young et al.
patent: 4859066 (1989-08-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 4950078 (1990-08-01), Sommargren
patent: 5064289 (1991-11-01), Bockman
patent: 5114234 (1992-05-01), Otsuka et al.
patent: 5133599 (1992-07-01), Sommargren
patent: 5187543 (1993-02-01), Ebert
patent: 5331400 (1994-07-01), Wilkening et al.
patent: 5408318 (1995-04-01), Slater
patent: 5486919 (1996-01-01), Tsuji et al.
patent: 5663793 (1997-09-01), de Groot
patent: 5724136 (1998-03-01), Zanoni
patent: 5757160 (1998-05-01), Kreuzer
patent: 5764361 (1998-06-01), Kato et al.
patent: 5801832 (1998-09-01), Van Der Brink
patent: 6008902 (1999-12-01), Rinn
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6124931 (2000-09-01), Hill
patent: 6134007 (2000-10-01), Naraki et al.
patent: 6137574 (2000-10-01), Hill
patent: 6181420 (2001-01-01), Badami et al.
patent: 6198574 (2001-03-01), Hill
patent: 6201609 (2001-03-01), Hill et al.
patent: 6208424 (2001-03-01), de Groot
patent: 6219144 (2001-04-01), Hill
patent: 6236507 (2001-05-01), Hill et al.
patent: 6246481 (2001-06-01), Hill
patent: 6252668 (2001-06-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6304318 (2001-10-01), Matsumoto
patent: 6327039 (2001-12-01), de Groot et al.
patent: 6330065 (2001-12-01), Hill
patent: 6407816 (2002-06-01), Hill
patent: 6417927 (2002-07-01), de Groot
patent: 6452682 (2002-09-01), Hill et al.
patent: 6512588 (2003-01-01), Hill
patent: 6525825 (2003-02-01), Hill
patent: 6525826 (2003-02-01), Hill
patent: 6529279 (2003-03-01), Hill
patent: 6541759 (2003-04-01), Hill
patent: 6552804 (2003-04-01), Hill
patent: 6650419 (2003-11-01), Hill
patent: 6727992 (2004-04-01), Hill
patent: 6738143 (2004-05-01), Chu
patent: 6747744 (2004-06-01), Hill
patent: 6757066 (2004-06-01), Hill
patent: 6762845 (2004-07-01), Hill
patent: 6791693 (2004-09-01), Hill
patent: 6795197 (2004-09-01), Hill
patent: 6806961 (2004-10-01), Hill
patent: 6806962 (2004-10-01), Hill
patent: 6819434 (2004-11-01), Hill
patent: 6836335 (2004-12-01), Hill
patent: 6839141 (2005-01-01), Hill
patent: 6867867 (2005-03-01), Hill
patent: 6891624 (2005-05-01), Hill
patent: 6912054 (2005-06-01), Hill
patent: 2001/0035959 (2001-11-01), Hill
patent: 2002/0089671 (2002-07-01), Hill
patent: 2003/0035112 (2003-02-01), Nevis
patent: 2003/0090675 (2003-05-01), Fujiwara
patent: 2004/0046965 (2004-03-01), Hill
patent: 2005/0134862 (2005-06-01), Hill
patent: 2070276 (1981-09-01), None
Badami et al. “Investigation of NonLinearity in High Accuracy Heterodyne Laser Interferometry.” American Society for Precision Engineering, 1997 Proceedings, 16, pp. 153-156, 1997.
Bennett, S.J. . “A Double-Passed Michelson Interferometer.” Optics Communications, 4:6, pp. 428-430, 1972.
Bobroff, Norman. “Recent advances in displacement measuring interferometry.” Meas. Sci. Technol. 4, pp. 907-926, 1993.
Bobroff, Norman. “Residual errors in laser interferometry from air turbulence and nonlinearity.” Applied Optics, 26:13, pp. 2676-2686, 1987.
Hines et al. Sub-Nonometer Laser Metrology—Some Techniques and Models. ESO Conference on High-Resolution Imaging by Interferometry II, pp. 1195-1204, 1991.
Mauer, Paul. “Phase Compensation of Total Internal Reflection.” J. Opt. Soc. Am., 56:9, pp. 1219-1221, 1966/.
Oka et al. “Polarization heterodyne interferometry using another local oscillator beam.” Optics Communications, 92, pp. 1-5, 1992.
Player, M.A. “Polarization properties of a cube-corner reflector.” J. Mod. Opt., 35:11, pp. 1813-1820, 1988.
Wu et al. “Analytical modeling of the periodic nonlinearity in heterodyne interferometry.” Applied Optics, 37:28, pp. 6696-6700, 1998.
Fish & Richardson P.C.
Lee Hwa (Andrew)
Zygo Corporation
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