Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-08-04
1997-04-22
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250306, 250310, G01B 902
Patent
active
056233388
ABSTRACT:
An apparatus suitable for providing near-field measurements of a workpiece. The apparatus comprises a source of electromagnetic radiation for generating an incident wave; means for directing at least a portion of the incident wave to the workpiece; a probe tip acting as an antenna and capable of re-radiating a signal wave, said signal wave developing as an interactive coupling between said workpiece and said probe tip; means for creating an interference signal based on the signal wave and a reference wave; and a detector for interrogating at least one of the phase and amplitude of the interference signal.
REFERENCES:
patent: 5340981 (1994-08-01), De Fornel et al.
F. Zenhausern, et al, "Apertureless near-field optical microscope", Appl. Phys. Lett. 65 (13) 26 Sep. 1994, pp. 1623-1625.
Martin Yves
O'Boyle Martin P.
Wickramasinghe Hemantha K.
Zenhausern Frederic
International Business Machines - Corporation
Kaufman Stephen C.
Merlino Amanda
Turner Samuel A.
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