Interferometric method and system

Details Interferometric method and system Interferometric method and system

1978-08-11

1982-07-20

Punter, William H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356349, G01B 902

Patent

active

043403042

ABSTRACT:
An interferometer for detecting defects in the surface of a mirror or inhomogeneities in a medium uses two coherent but orthogonally polarized beams, one of which may be frequency or phase modulated. The two beams are separately directed into a test arm and a reference arm and, upon their return, recombined, and polarization filtered so that they interfere. The interference pattern is detected in a plane in plural, individual detection points. The resulting electrical signals are processed to obtain OPD information at a resolution that is much higher than the wavelength of the beams used. An alternative method using neither phase modulation nor frequency modulation is based on additional, separate point by point detection of the intensities of the individual beams.

REFERENCES:
patent: 3345909 (1967-10-01), De Maria
patent: 3620593 (1971-11-01), Tackaberry
patent: 3656853 (1972-04-01), Bagley
patent: 3694088 (1972-09-01), Gallagher
patent: 3767307 (1973-10-01), Bowker
patent: 3836256 (1974-09-01), Peters
patent: 3849003 (1974-11-01), Velzel
patent: 4030831 (1977-06-01), Gowrinathan
patent: 4188122 (1980-02-01), Massie et al.

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