Interferometric measuring methods for surfaces

Details Interferometric measuring methods for surfaces Interferometric measuring methods for surfaces

1987-08-31

1988-08-16

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356356, 356363, G01B 902

Patent

active

047640146

ABSTRACT:
A surface to be tested is illuminated with two beams polarized perpendicularly to each other, extending symmetrically to an optical axis and focussed on the surface by a lens. The light scattered at the surface is separated from the directly reflected light by a reflecting diaphragm, and by means of electro-optical compensation (with an electro-optical modulator and photodetector) the scattered light is tested for phase difference which is a function of the distance of a scattering element of the surface from the optical axis. The phase difference within the illuminated spot is a unique function of the distance of the scattering element from the optical axis, if a diffraction-limited optical system is used.

REFERENCES:
patent: 4188122 (1980-02-01), Massie et al.
patent: 4358201 (1982-11-01), Makosch
Denby et al., "Plane-Surface Strain Examination by Speckle-Pattern Interferometry Using Electronic Processing", J. Strain. Anal. vol. 9, No. 1, pp. 17-25 1/74.
Makosch et al., "Automatic Evaluation of Interference Patterns", IBM Tech. Discl. Bull., vol. 24, No. 5, pp. 2660-2662, 10/81.

Affiliated with

Also associated with

Rating

Interferometric measuring methods for surfaces does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometric measuring methods for surfaces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometric measuring methods for surfaces will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-597413