Interferometric measuring method based on multi-pole sensing

Details Interferometric measuring method based on multi-pole sensing Interferometric measuring method based on multi-pole sensing

1995-08-04

1997-04-22

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250307, G01B 902

Patent

active

056233396

ABSTRACT:
A method for deriving physical properties of a workpiece. The method comprises the steps of sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded scattered wave information derivable from a multi-pole interactive coupling between a probe tip and the workpiece; decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information; and, correlating this information to referent physical-chemical properties of the workpiece.

REFERENCES:
patent: 5340981 (1994-08-01), De Fornel et al.
F. Zenhausern, et al, "Apertureless near-field optical microscope", Appl. Phys. Lett. 65 (13) 26 Sep. 1994, pp. 1623-1625.

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