Interferometric measuring device utilizing a slanted probe...

Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer

Reexamination Certificate

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Reexamination Certificate

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07339679

ABSTRACT:
An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short coherent radiation by a radiation source, having a measuring probe that is spatially separated from the modulating interferometer and is coupled to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and having receiver and evaluating devices for converting the supplied radiation into electrical signals and for evaluating the signals based on phase difference. A construction for reliable measurements even in tight hollow spaces provides that the partially transmitting region is formed by a slanting exit face of a probe fiber at an exit angle as to the optical probe axis and a likewise slanting entrance face, of a fiber section following on the object side, as to the optical probe axis at an entrance angle, a wedge-shaped gap being formed between the exit and entrance surfaces.

REFERENCES:
patent: 6741355 (2004-05-01), Drabarek
patent: 198 08 273 (1999-09-01), None
patent: 198 19 762 (1999-11-01), None

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